Lenses

Electron optical lens, whose core function is to focus, image, or deflect the electron beam through an electromagnetic field, belongs to the subdivision direction of optoelectronics devices or electron beam manipulation devices.

 

1. What are Lenses of Optics?

The electronic optical lens modulates the electron beam path through an electromagnetic field (rather than the glass medium of the traditional optical lens), uses a magnetic field or electric field to change the trajectory of electron movement, and realizes the focusing and magnification function similar to an optical lens. Its key structure includes components such as coils and magnetic poles. By adjusting the current intensity, the magnetic field distribution can be dynamically changed to adjust the focal length and imaging effect of the electron beam.

 

2. What are Lenses of Optics Used for?

Electron Microscope (TEM): In the transmission electron microscope, an electron lens is used to control the focusing and image magnification of the electron beam, which directly affects the imaging resolution and clarity.

 

Semiconductor Manufacturing: High-precision electron beam lithography technology relies on an electron lens to achieve the characterization of tiny circuits.

 

Optoelectronics Devices: In semiconductor optoelectronics devices (such as lasers), electron beam control technology can optimize the energy transmission path.

 

3. What are the Classification and Characteristics of Lenses of Optics?

Active Devices: require external power supply, and belong to the category of active devices, in contrast to passive components (such as resistors and capacitors).

 

High-precision Requirements: due to nanoscale manipulation, extremely high requirements are placed on material purity, magnetic field uniformity, and current stability.

 

4. Differences from Traditional Optical lenses‌

Comparison Dimensions	Electron Optical Lens	Traditional Optical Lens
Medium	Electromagnetic field	Glass/crystal material
Adjustment method	Current controls magnetic field strength	Physical movement of the lens position
Applicable wavelength	Electron wave (ultra-short wavelength)	Visible light/infrared light, etc.
Typical equipment	Electron microscope, electron beam lithography machine	Optical microscope, camera lens

5. Technological Development Trend of Lenses of Optics

As semiconductor technology evolves to smaller processes, the demand for the application of electron optical lenses in multi-beam electron beam lithography and quantum dot device preparation continues to grow, and its design tends to be integrated and low-power.